The 18th Joint Vacuum Conference | September 5-9, 2022 | Graz, Austria (Hybrid Event)

Exploring the Vacuum Frontier

Thin Films • Surface Science • Nanotechnology • Plasma Physics
Download Book of Abstracts

Advancing the Frontiers of Vacuum Science and Technology: A Comprehensive Overview of JVC 2022 Themes

The Joint Vacuum Conference (JVC) has long served as a pivotal gathering for the European and global scientific communities. Established as a merger of the national vacuum conferences of Austria, Croatia, the Czech Republic, Hungary, Slovakia, and Slovenia, the JVC has evolved into a premier multidisciplinary forum. The 2022 edition, marking the 18th iteration of this prestigious event, brought together leading physicists, chemists, engineers, and industry experts to discuss the latest breakthroughs in vacuum science. This article provides an extensive overview of the core scientific themes explored during the conference, highlighting the critical role of vacuum technology in shaping the modern world.

1. The Foundation: Vacuum Science and Instrumentation

At the heart of the conference lies the fundamental discipline of vacuum science. While often taken for granted, the ability to create, maintain, and measure vacuum environments is the bedrock upon which modern high-technology manufacturing rests. Without advanced vacuum systems, the semiconductor industry—and by extension, the digital age—would not exist.

Discussions at JVC 2022 focused heavily on the next generation of vacuum generation. Turbo-molecular pumps and cryopumps are being pushed to their limits to achieve Ultra-High Vacuum (UHV) and Extreme-High Vacuum (XHV) conditions. XHV, defined as pressures below 10^-12 mbar, is becoming increasingly relevant for quantum computing applications and particle accelerators like CERN's Large Hadron Collider. Researchers presented novel getter materials—alloys that chemically trap gas molecules—capable of maintaining these extreme conditions for extended periods without power.

Furthermore, metrology remains a hot topic. The redefinition of the SI unit for pressure requires new standards. Presentations detailed the development of optical pressure standards based on the refractive index of gases, promising to replace traditional mercury manometers with quantum-based precision.

2. Thin Films and Coatings: The Functional Layers

One of the most expansive sessions at JVC 2022 was dedicated to Thin Films. This field encompasses the deposition of material layers ranging from fractions of a nanometer to several micrometers in thickness. The applications are ubiquitous, ranging from the anti-reflective coating on your eyeglasses to the wear-resistant layer on industrial drill bits.

Physical Vapor Deposition (PVD)

PVD technologies, particularly Magnetron Sputtering, continue to evolve. A major focus was on High-Power Impulse Magnetron Sputtering (HiPIMS). Unlike traditional DC sputtering, HiPIMS uses short, high-energy pulses to ionize the sputtered material. This results in denser, harder, and smoother coatings. Papers presented at the conference demonstrated how HiPIMS is being used to create "hard coatings" like Titanium Aluminum Nitride (TiAlN) with enhanced thermal stability for aerospace applications.

Atomic Layer Deposition (ALD)

As electronic devices shrink to the nanoscale, traditional deposition methods struggle to coat complex 3D structures uniformly. ALD has emerged as the solution. By introducing precursor gases sequentially, ALD allows for the growth of films one atomic layer at a time. This self-limiting process ensures perfect conformality, even in deep trenches. JVC 2022 highlighted new ALD precursors for depositing dielectric materials in next-generation transistors (GAA-FETs) and for coating porous battery electrodes to improve longevity.

3. Surface Science: Probing the Interface

The surface of a material is where it interacts with the world. It is where corrosion happens, where catalysts function, and where cells adhere to implants. Surface Science seeks to understand these interactions at the atomic level. The conference showcased the latest advancements in surface analysis techniques.

X-ray Photoelectron Spectroscopy (XPS) remains the workhorse of surface analysis. However, new developments in Near-Ambient Pressure XPS (NAP-XPS) are revolutionizing the field. Traditionally, XPS required UHV conditions. NAP-XPS allows researchers to analyze surfaces in the presence of gases, simulating real-world conditions. This is crucial for understanding heterogeneous catalysis, such as how catalytic converters reduce car emissions or how hydrogen fuel cells operate.

Scanning Probe Microscopy (SPM), including STM and AFM, was another focal point. Researchers presented stunning images of individual molecules manipulating on surfaces, paving the way for molecular electronics. The ability to manipulate single atoms is no longer science fiction but a laboratory reality discussed extensively in Graz.

4. Nanotechnology and 2D Materials

No modern physics conference is complete without a deep dive into Nanotechnology. JVC 2022 placed a spotlight on two-dimensional (2D) materials. Since the discovery of Graphene, the "wonder material," the family of 2D materials has expanded to include Transition Metal Dichalcogenides (TMDs) like Molybdenum Disulfide (MoS2) and hexagonal Boron Nitride (h-BN).

The "Van der Waals Heterostructures" session was particularly well-attended. Scientists are now stacking these 2D layers like Lego bricks to create designer materials with tailored optical and electronic properties. For instance, stacking graphene with h-BN creates a transistor with incredible electron mobility. The vacuum conditions required to synthesize and process these delicate layers are stringent, reinforcing the synergy between vacuum science and nanotechnology.

5. Plasma Physics and Processing

Plasma, the fourth state of matter, is the engine of the microelectronics industry. Plasma etching is the chisel used to carve the intricate patterns of integrated circuits. JVC 2022 explored the physics of non-equilibrium plasmas and their interactions with matter.

A key challenge addressed was the "Atomic Layer Etching" (ALE). Just as ALD deposits one layer at a time, ALE removes one atomic layer at a time. This precision is vital for manufacturing 5nm and 3nm logic chips. Without the precise control offered by plasma diagnostics and vacuum technology, Moore's Law would have hit a wall years ago.

Beyond electronics, plasma medicine is an emerging field. Cold atmospheric plasmas are being investigated for their bactericidal properties. They can sterilize wounds and medical instruments without damaging healthy tissue. The vacuum community plays a vital role in designing the sources and understanding the radical species generated in these plasmas.

6. Biointerfaces and Vacuum in Medicine

The intersection of biology and vacuum technology (Biointerfaces) is a rapidly growing interdisciplinary field. When an artificial hip is implanted, the body's response depends entirely on the surface properties of the implant. Vacuum coating technologies are used to create biocompatible surfaces.

Presenters at JVC 2022 shared research on Diamond-Like Carbon (DLC) coatings for artificial heart pumps. DLC is chemically inert and extremely smooth, preventing blood clots from forming. Furthermore, vacuum freeze-drying (lyophilization) remains the standard for preserving pharmaceutical vaccines and biological samples. Innovations in process control for lyophilization were discussed to ensure the stability of sensitive mRNA vaccines, a topic of high relevance in the post-pandemic era.

7. Energy and Sustainability

Finally, the conference addressed the global energy crisis. Vacuum technology is an enabler for renewable energy solutions. Thin-film solar cells (CIGS and Perovskites) offer a cheaper, flexible alternative to rigid silicon panels. These are manufactured using large-scale vacuum deposition.

Fusion energy, the holy grail of clean power, relies on the largest vacuum vessels ever built (like the ITER tokamak). JVC 2022 featured updates on the vacuum challenges of ITER, particularly in leak detection and materials that can withstand the neutron bombardment of a fusion reaction. The community is acutely aware of its responsibility to contribute to a sustainable future.

Conclusion

The 18th Joint Vacuum Conference (JVC 2022) was a testament to the vitality and relevance of vacuum science. It is a field that underpins almost every aspect of modern technology, from the phone in your pocket to the solar panels on your roof. The convergence of disciplines—physics, chemistry, engineering, and biology—under the umbrella of vacuum technology fosters innovation that drives society forward.

As we look toward the future, the challenges are immense. We need cleaner energy, faster computers, and better healthcare. The solutions to these problems will likely be found, at least in part, inside a vacuum chamber. The community looks forward to the next gathering, continuing the tradition of excellence and collaboration that JVC represents.


For the full proceedings and individual abstract downloads, please visit the member portal.

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